征文主题:Si、Ge、SOI、GOI、SiC和化合物半导体等衬底材料;用于集成电路和光电器件制造的高-k/金属栅叠层、Low-k材料、GeSi外延层、GeSn外延层、PCRAM存储材料、RRAM介质材料、STT-MRAM用磁性薄膜等新型薄膜材料;光刻胶、DSA、各类CVD和ALD前驱体、CMP抛光材料、工艺化学品、靶材等集成电路制造工艺材料;新型显示材料;先进封装材料;新型二维材料;新型存储材料与技术显示材料;碳纳米管,石墨烯等碳基功能材料;材料检测技术与方法;材料设计理论与计算模拟。
Main Topics: (Interest include, but not limited to)
Substrate materials such as Si, Ge, SOI, GOI, SiC and compound semiconductors;
High-k, Low-k, GeSi, GeSn, PCRAM, RRAM, STT-MRAM, and other materials used in integrated circuits and optoelectronic devices;
New display materials;
Carbon nanotubes, graphene and other carbon based functional materials;
Photoresists, DSA, CVD and ALD precursors, CMP materials, process chemicals and targets for integrated circuit fabrication and manufacturing;
Advanced packaging materials;
Materials characterization technology and methods;
Materials design theory and simulation;
Novel two dimensional materials;
Post-CMOS device options;
Novel memory materials and technologies.
支持单位:中国科学院上海微系统与信息技术研究所
论文出版:可推荐至 Springer的Proceedings系列《Lecture Notes in Electrical Engineering》(EI收录)发表。作者也可根据自身情况选择期刊,并提前告知大会联系人。
联系方式:宋三年 中国科学院上海微系统与信息技术研究所
13818144065, songsannian@mail.sim.ac.cn